Frequency adjustment apparatus, frequency adjustment method and program



PROBLEM TO BE SOLVED: To provide a frequency adjustment apparatus that implements a short cycle time of a frequency adjustment process.SOLUTION: A plurality of piezoelectric elements arranged in a line are moved in the direction of arrangement to a measurement range of a pre-processing measurement section 9 which measures a resonance frequency of one of the plurality of piezoelectric elements arranged in a line. An ion beam is next radiated in a radiation amount based on the result of measurement from an ion gun 11 arranged downstream of the pre-processing measurement section 9 along the direction of movement of the piezoelectric elements. A post-processing measurement section 10 can be further arranged downstream of the ion gun 11 along the direction of feeding of the piezoelectric elements to measure a resonance frequency of the piezoelectric element irradiated with the ion beam and reflect it in the next ion beam radiation amount.
【課題】周波数調整処理のタクトタイムを短縮できる周波数調整装置等を提供する。 【解決手段】一列に配列された複数の圧電素子を、その配列方向に、処理前測定部9の測定領域まで移動させ、一列に配列された複数の圧電素子のうちいずれかひとつの圧電素子の共振周波数を測定する。その後、測定結果も基づく照射量のイオンビームを、処理前測定部9よりも圧電素子の移動方向の下流側に配置されたイオンガン11から照射させる。さらに、処理後測定部10を圧電素子の搬送方向のイオンガン11より下流側に配置して、イオンビーム照射後の圧電素子の共振周波数を測定して、次のイオンビームの照射量に反映させることができる。 【選択図】図8




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